Author Affiliations
Abstract
1 Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 101804, China
3 School of Physics Science and Technology, Xinjiang University, Urumqi 830046, China
4 School of New Energy and Electronics, Yancheng Teachers University, Yancheng 224002, China
5 Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Ex situ characterization techniques in molecular beam epitaxy (MBE) have inherent limitations, such as being prone to sample contamination and unstable surfaces during sample transfer from the MBE chamber. In recent years, the need for improved accuracy and reliability in measurement has driven the increasing adoption of in situ characterization techniques. These techniques, such as reflection high-energy electron diffraction, scanning tunneling microscopy, and X-ray photoelectron spectroscopy, allow direct observation of film growth processes in real time without exposing the sample to air, hence offering insights into the growth mechanisms of epitaxial films with controlled properties. By combining multiple in situ characterization techniques with MBE, researchers can better understand film growth processes, realizing novel materials with customized properties and extensive applications. This review aims to overview the benefits and achievements of in situ characterization techniques in MBE and their applications for material science research. In addition, through further analysis of these techniques regarding their challenges and potential solutions, particularly highlighting the assistance of machine learning to correlate in situ characterization with other material information, we hope to provide a guideline for future efforts in the development of novel monitoring and control schemes for MBE growth processes with improved material properties.
epitaxial growth thin film in situ characterization molecular beam epitaxy (MBE) 
Journal of Semiconductors
2024, 45(3): 031301
作者单位
摘要
1 上海大学通信与信息工程学院特种光纤与光接入网重点实验室,特种光纤与先进通信国际合作联合实验室,上海 200444
2 上海市计量测试技术研究院,上海 200233
为保证电气电子设备在辐射抗扰度试验中状态传输的稳定性,设计并实现了适用于试验环境的光纤束监控系统。系统主要由物镜、光纤束、转接镜和电荷耦合器件等组件构成。通过Zemax光学仿真软件,结合光纤束参数设计并优化了监控系统的物镜。设计结果表明:物镜在空间频率36 lp/mm处,各视场光学调制传递函数值大于0.8,像面大小与光纤束尺寸匹配,满足像方远心光路要求。对加工的物镜进行性能测试,表明其技术指标与理论设计比较相符。采用搭建的光纤束监控系统进行成像试验,并运用高斯滤波算法进行去像素化处理,提高了监控系统的视频传输质量,辐射抗扰度试验表明此系统具有良好的抗电磁干扰能力。
光学设计 监控系统 光纤束 辐射抗扰度 
激光与光电子学进展
2023, 60(7): 0722001
作者单位
摘要
上海工程技术大学航空运输学院,上海 201620
为解决航站楼内非视距误差降低三边定位算法精度的问题,提出自适应三边定位算法。该算法通过引入平均差作为基站选择的标准,选择距离平均差最小的三个基站,提升了基站到标签距离信息的可靠性。并以欧氏距离判断三边定位算法中两圆的位置关系,结合位置判断系数和平均差来修正误差可能性大的圆半径。设计迭代更新圆半径的流程,以两圆相交点距离10 cm为迭代停止阈值,将三圆交点的外接圆的圆心作为标签的位置。添加高斯噪声来近似非视距误差,通过仿真实验验证算法的有效性,在10%高斯噪声下,标签定位误差为10.5 cm。并搭建实际旅客定位系统,实验验证本文算法的标签定位精度小于10 cm,较加权质心法,本文算法的定位误差在XYZ方向上降低了13%。
遥感 自适应三边定位算法 非视距误差 航站楼 室内定位 超宽带 
激光与光电子学进展
2022, 59(2): 0228002
刘明欢 1,2,*付秀华 1王菲 1唐健 2[ ... ]刘风雷 2
作者单位
摘要
1 长春理工大学 光电工程学院, 吉林 长春 130022
2 浙江水晶光电科技股份有限公司 中央研究院, 浙江 台州 318015
提出了在波矢k空间中设计衍射光波导片的相关理论, 系统仿真并研究了光线波长、光栅周期、光栅时钟角、波导基底折射率以及波导基底折射率色散对衍射光波导视场角以及相关设计参数的影响。设计结果表明, 当使用宽光谱光源时, 光谱带边缘波长的视场存在切割, 对显示效果影响不大, 衍射光波导片适用于宽光谱光源。波导基底折射率色散对衍射光波导设计的影响可以忽略。时钟角为40-270-140时, 各个光栅区域位置及尺寸合适, 适合于实际加工。本工作对衍射光波导的设计提供了积极的指导和借鉴。
增强现实 衍射光波导 波矢空间 augmented reality diffraction waveguides wave-vector space 
液晶与显示
2021, 36(3): 389
Dapeng Liu 1,2Jian Tang 1,2Yao Meng 1,2Wei Li 1,2[ ... ]Ming Li 1,2
Author Affiliations
Abstract
1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Science, Beijing 100049, China
A modulator is an essential building block in the integrated photonics, connecting the electrical with optical signals. The microring modulator gains much attention because of the small footprint, low drive voltage and high extinction ratio. An ultra-low Vpp and high-modulation-depth indium phosphide-based racetrack microring modulator is demonstrated in this paper. The proposed device mainly comprises one racetrack microring, incorporating a semiconductor amplifier, and coupling with a bus waveguide through a multimode interference coupler. Traveling wave electrodes are employed to supply bidirectional bias ports, terminating with a 50-Ω impedance. The on/off extinction ratio of the microring reaches 43.3 dB due to the delicately tuning of the gain. An 11 mV Vpp, a maximum 42.5 dB modulation depth and a 6.6 GHz bandwidth are realized, respectively. This proposed microring modulator could enrich the functionalities and designability of the fundamental integrated devices.
Journal of Semiconductors
2021, 42(8): 082301
刘明欢 1,2,3,*付秀华 1王菲 1唐健 2[ ... ]刘风雷 2
作者单位
摘要
1 长春理工大学 光电工程学院,吉林 长春 130022
2 浙江水晶光电科技股份有限公司 中央研究院,浙江 台州 318015
3 中国科学院 长春光学精密机械与物理研究所 应用光学国家重点实验室, 吉林 长春130033
体光栅波导作为实现增强现实显示的一种方案,其核心是体光栅的制备。本工作提出了一种简单,易于搭建的非对称曝光的光路,制备的倾斜体光栅衍射效率高达80%。使用632.8 nm He-Ne激光监测光栅的演化过程,结果表明光栅在25 s内反应结束,形成光栅。SEM图像证明了光栅的倾斜特性,并与理论计算结果一致。制备的倾斜体光栅的衍射效率失谐曲线与耦合波理论取得了良好的一致性,其半高宽为3.22°。倾斜体光栅可以被外界电场调谐,90%以及10%调谐场强分别为5.1 V/μm以及11.25 V/μm。本工作对倾斜/液晶聚合物体光栅的制备提供了积极的指导和借鉴。
液晶/聚合物光栅 倾斜体光栅 衍射效率失谐 电场调谐 liquid crystal/polymer grating slanted volume grating diffraction efficiency mismatch electrical switching 
液晶与显示
2020, 35(10): 1012
Tengfei Hao 1,2,3Yanzhong Liu 1,2,3Jian Tang 1,2,3Qizhuang Cen 4[ ... ]Ming Li 1,2,3,*
Author Affiliations
Abstract
1 Chinese Academy of Sciences, Institute of Semiconductors, State Key Laboratory on Integrated Optoelectronics, Beijing, China
2 University of Chinese Academy of Sciences, School of Electronic, Electrical, and Communication Engineering, Beijing, China
3 University of Chinese Academy of Sciences, Center of Materials Science and Optoelectronics Engineering, Beijing, China
4 Beijing University of Posts and Telecommunications, State Key Laboratory of Information Photonics and Optical Communications, Beijing, China
5 Universitat Politécnica de Valencia, ITEAM Research Institute, Photonics Research Labs, Valencia, Spain
6 University of Ottawa, Microwave Photonics Research Laboratory, Ottawa, Ontario, Canada
An optoelectronic oscillator (OEO) is a microwave photonic system that produces microwave signals with ultralow phase noise using a high-quality-factor optical energy storage element. This type of oscillator is desired in various practical applications, such as communication links, signal processing, radar, metrology, radio astronomy, and reference clock distribution. Recently, new mode control and selection methods based on Fourier domain mode-locking and parity-time symmetry have been proposed and experimentally demonstrated in OEOs, which overcomes the long-existing mode building time and mode selection problems in a traditional OEO. Due to these mode control and selection methods, continuously chirped microwave waveforms can be generated directly from the OEO cavity and single-mode operation can be achieved without the need of ultranarrowband filters, which are not possible in a traditional OEO. Integrated OEOs with a compact size and low power consumption have also been demonstrated, which are key steps toward a new generation of compact and versatile OEOs for demanding applications. We review recent progress in the field of OEOs, with particular attention to new mode control and selection methods, as well as chip-scale integration of OEOs.
optoelectronic oscillator microwave photonics Fourier domain mode-locking parity-time symmetry photonics integrated circuits 
Advanced Photonics
2020, 2(4): 044001
作者单位
摘要
盐城师范学院物理与电子工程学院, 江苏盐城 224007
基于衍射光学元件的衍射效率与微结构高度误差的关系, 提出了环境温度、微结构高度误差与衍射效率和带宽积分平均衍射效率的数学分析模型。研究了环境温度变化对带宽积分平均衍射效率的影响, 分析了工作在一定温度范围内时带宽积分平均衍射效率与相对微结构高度误差的关系。对于工作在 8~12 .m长波红外波段的衍射光学元件, 偏离设计波长越远, 其衍射效率受温度的影响越大。温度的变化会引起 100%衍射效率对应的峰值相对微结构高度误差发生改变。当衍射光学元件的相对微结构高度误差在±15%范围内时, 衍射效率在-40℃~80℃的整个温度范围内高于 91.89%, 带宽积分平均衍射效率在整个温度范围内高于 88.58%。
衍射光学 衍射效率 微结构高度误差 diffractive optics, diffraction efficiency, micros 
红外技术
2020, 42(3): 213
作者单位
摘要
盐城师范学院新能源与电子工程学院, 江苏 盐城 224051
基于衍射效率与入射角度的表达式和正入射时微结构高度误差与衍射效率的表达式,建立了斜入射时衍射光学元件(DOEs)的微结构高度误差与衍射效率和带宽积分平均衍射效率(PIDE)的数学关系。当相对微结构高度误差的绝对值相等时,负相对微结构高度误差高于正相对微结构高度误差对应的衍射效率和带宽积分平均衍射效率。该分析方法和结论为衍射光学元件的微结构高度加工公差的制定提供了理论参考。
衍射 衍射光学元件 衍射效率 微结构高度误差 
激光与光电子学进展
2017, 54(6): 060501
作者单位
摘要
1 上海交通大学 电子信息与电气工程学院 微米/纳米加工技术国家级重点实验室, 薄膜与微细技术教育部重点实验室, 上海市北斗导航与位置服务重点实验室, 上海 200240
2 上海航天控制技术研究所 惯性工程技术研究中心,上海 201109
提出了一种新型的基于阳极键合的硅微圆盘多环谐振陀螺的结构设计及其制作方法。该种陀螺采用MEMS工艺制作而成,基底材料为肖特BF33玻璃,电极和谐振器均由单晶硅片加工而成,肖特BF33玻璃与单晶硅片通过阳极键合工艺键合在一起。介绍了该种陀螺的基本结构、工作原理,并进行了仿真分析,得出该种陀螺具有较小的频率分裂,表现出陀螺效应。最后,通过MEMS工艺进行了实际加工,得到了该种陀螺的实验样品。
阳极键合 圆盘多环谐振陀螺 MEMS工艺 anodic bonding disc resonator gyroscope MEMS technology 
半导体光电
2017, 38(2): 199

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